Silicon Wafer Equipment Product Catalog
Achieving high flatness wafer processing! A wide range of equipment for silicon wafers that we handle is featured!
This catalog introduces the silicon wafer processing equipment handled by Speedfam. It includes the polishing device "DSM20B-5P-4D-AL" for double-sided simultaneous mirror polishing of φ300mm silicon wafers, the "EP-300-X" with a dry-in-dry-out structure, and the "EP-200-XW-II" capable of cassette-to-cassette and slot-to-slot wafer transport. Please make use of this for product selection. [Contents] ■DSM20B-5P-4D-AL ■EP-300-X ■EP-200-XW-II ■Fully Automated Single Side Polishing Line FAM 59SPAW *For more details, please refer to the PDF document or feel free to contact us.
- Company：スピードファム
- Price：Other
